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Memorial University - Electronic Theses and Dissertations 4
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Document Description
TitleCharacterizing the initial state of cantilever sensors
AuthorXu, Meng.
DescriptionThesis (M.Sc.)--Memorial University of Newfoundland, 2009. Physics and Physical Oceanography
Date2008
Paginationix, 106 leaves : ill.
SubjectCurvature; Detectors--Design and construction; Flexure; Microelectromechanical systems
DegreeM.Sc.
Degree GrantorMemorial University of Newfoundland. Dept. of Physics and Physical Oceanography
DisciplinePhysics and Physical Oceanography
LanguageEng
NotesIncludes bibliographical references (leaves 36-37)
AbstractCantilevers are ultra-sensitive sensors capable of detecting a variety of physical and chemical phenomena. Due to the construction of the sensor, the cantilevers are often pre-bent prior to using them as actual sensors. In order to properly interpret further cantilever deflections due to sensing events, it is important to understand the initial states of the cantilever. Also it is imperative to establish the initial orientation of the cantilever chip with respect to the horizontal. In this work, a new model to measure the initial orientation of the chip has been developed using the standard optical beam deflection system. Using reference chips inclined at , 3.5°, and , the proposed method was shown to be successful. A new method was also developed to measure the initial curvature based entirely on the vertical motion of the incident laser. Results compared to optical images showed our method to be successful. Lastly, based on our ability to measure the angle of inclination of the chip, we have successfully modified the "Rotating Method" developed previously in our group.
TypeText
FormatImage/jpeg; Application/pdf
SourcePaper copy kept in the Centre for Newfoundland Studies, Memorial University Libraries
Local Identifiera3217574
RightsThe author retains copyright ownership and moral rights in this thesis. Neither the thesis nor substantial extracts from it may be printed or otherwise reproduced without the author's permission.
CollectionElectronic Theses and Dissertations
Scanning StatusCompleted
PDF File(11.51 MB) -- http://collections.mun.ca/PDFs/theses/Xu_Meng.pdf
CONTENTdm file name109174.cpd